Получение пригодного для сенсорики пористого кремния методом неэлектролитического травления MacEtch
The author suggests using the etching method MacEtch (metal-assisted chemical etching) for production of micro- and nanostructures of porous silicon. The paper presents research results on the morphology structures obtained at different parameters of deposition and etching processes. The research ha...
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| Date: | 2013 |
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| Main Author: | |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2013
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.6.52 |
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| Journal Title: | Technology and design in electronic equipment |