Двухфункциональный датчик давления-температуры на основе нитевидных кристаллов кремния

• Date: 2013
• Main Authors: Druzhinin, A. A., Kutrakov, A. P., Liakh-Kaguy, N. S., Vuitsyk, A. M.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2013
• Subjects: нитевидные кристаллы; кремний; датчик; температура; давление
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.4.23
• Journal Title: Technology and design in electronic equipment

The article presents the design of a pressure-temperature sensor based on p-type silicon whiskers, doped with boron, with a resistivity of 0,005 Ohm?cm. The sensor is operable in a temperature range from –100 to +200°C and at pressures from 0 to 20 MPa. The sensor is designed for a wide range of app...