Высокотемпературные датчики давления с тензорезисторами на основе нитевидных кристаллов кремния
Studies aimed at the creating of piezoresistive pressure sensors based on silicon whiskers, operating at high temperatures were carried out. Using the glass adhesive for strain gauges mounting on spring elements of covar alloy gave the possibility to elevate the sensor’s operating temperature range....
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| Date: | 2012 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2012
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2012.6.25 |
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| Journal Title: | Technology and design in electronic equipment |