Стимулируемая водородом миграция атомов металлов в структурах «металл — полупроводник»

• Datum: 2012
• Hauptverfasser: Matyushin, V. M., Zhavzharov, E. L.
• Format: Artikel
• Sprache: Ukrainian
• Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2012
• Schlagworte: омические контакты; гетеродиффузия; атомарный водород
• Online Zugang: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2012.6.44
• Назва журналу: Technology and design in electronic equipment

The article presents experimental results of the effect atomic hydrogen has on the Cu—Ge and Ni—Ge structures. It has been shown experimentally that the treatment of structures at room temperature is accompanied by the introduction of metal atoms with an abnormally high concentration in the surface...