Технология создания легированных бором слоев на алмазе

• Date: 2012
• Main Authors: Zyablyuk, K. N., Mityagin, A. Yu., Talipov, N. H., Chucheva, G. V., Duhnovskii, M. P., Khmel’nitskii, R. A.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2012
• Subjects: алмаз; легирование бором; ионная имплантация; СВЧ-транзистор
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2012.5.39
• Journal Title: Technology and design in electronic equipment

The authors investigated natural type IIa diamond crystals and CVD diamond films. The article presents electrophysical parameters of the structures obtained in different modes of ion implantation of boron into the crystal with further annealing. Parameters of the crystals with a high nitrogen impuri...