Кинетика процессов осаждения пленок поликремния, легированного кислородом в про­цес­се роста

• Date: 2012
• Main Authors: Nalivaiko, O. Yu., Тurtsevich, A. S.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2012
• Subjects: поликристаллический кремний; адсорбционно-кинетическая модель; процесс осаждения пленок
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2012.2.37
• Journal Title: Technology and design in electronic equipment

The influence of deposition conditions on composition of in-situ oxygen doped polysilicon films has been investigated. A kinetic model of adsorption-deposition process using concentrated silane and nitrous oxide has been developed. The range of optimal ratios of silane and nitrous oxide flows and de...