Роль пластической деформации в получении нанокремния

• Date: 2011
• Main Authors: Smyntyna, V. A., Kulinich, O. A., Yatsunkiy, I. R., Marchuk, I. A.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2011
• Subjects: наноструктурированный кремний; пластическая деформация
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2011.1-2.22
• Journal Title: Technology and design in electronic equipment

The quantity and quality analysis of plastic deformation and near-surface silicon layers with nanostructure silicon formation are given in this paper. It is shown, due to high-temperature oxidation and other factors the complex defect structure is generated in near-surface silicon layers. It consist...