Свойства металлических контактов на пленках TiO2, изготовленных методом реактивного магнетронного распыления

Свойства металлических контактов на пленках TiO2, изготовленных методом реактивного магнетронного распыления

The article deals with research on volt-ampere characteristics of metal contacts (Al, Cr, In, Mo, Ti) on titanium dioxide thin films and influence of annealing in vacuum on their electric properties. Volt-ampere characteristics measurements were taken by three-probe method. There was established tha...

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Bibliographic Details
Date:2010
Main Authors: Brus, V. V., Kovaluk, Z. D., Maryanchuk, P. D., Orletsky, I. G., Maystruk, E. V.
Format: Article
Language:Ukrainian
Published: PE "Politekhperiodika", Book and Journal Publishers 2010
Subjects:
диоксид титана
пленки
магнетронное распыление
Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.5-6.60
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Journal Title:Technology and design in electronic equipment

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Technology and design in electronic equipment
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Summary:The article deals with research on volt-ampere characteristics of metal contacts (Al, Cr, In, Mo, Ti) on titanium dioxide thin films and influence of annealing in vacuum on their electric properties. Volt-ampere characteristics measurements were taken by three-probe method. There was established that indium contact on TiO2 thin films possessed sharply defined ohmic properties.

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