Газочувствительные элементы на основе пленок SiPcCl2

• Date: 2010
• Main Authors: Alieva, Kh. S., Sulejmanov, S. S., Murshudli, M. N.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2010
• Subjects: газочувствительный элемент; резистивная структура; оксиды азота; напыление пленок; детектирующие характеристики фталоцианина кремния
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.2.58
• Journal Title: Technology and design in electronic equipment

Influence of technological parameters (reception conditions, heat treatment and thickness) on electric and sensing properties of SiPcCl2 films is analysed. The films are received by a evaporating method. High sensitivity to oxides of nitrogen is shown. Electric and sensing properties are compared at...