Закономерности формирования пучка ионов низ­кой энер­гии при по­мо­щи од­но­се­точ­ной ион­но-оп­ти­чес­кой сис­те­мы

• Date: 2009
• Main Authors: Dudin, S. V., Rafalskyi, D. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2009
• Subjects: ВЧ индукционный разряд; ионно-оптическая система; формирование пучка ионов
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.6.42
• Journal Title: Technology and design in electronic equipment

The experimental investigations of principles of low energy ion beam formation in single-grid ion optical system with ICP discharge are reported. Two modes of ions extraction are discovered: beam regime and plasma regime with transition at some critical potential of inductively coupled plasma. Numer...