Адсорбционно-кинетическая модель осаждения пле­нок по­ли­крис­тал­ли­чес­ко­го крем­ния, ле­ги­ро­ван­ных фос­фо­ром в про­цес­се рос­та

• Date: 2009
• Main Authors: Nalivaiko, O. Yu., Turtsevich, A. S.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2009
• Subjects: поликристаллический кремний; осаждение; адсорбционно-кинетическая модель
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.6.50
• Journal Title: Technology and design in electronic equipment

The investigation of deposition kinetics of in-situ phosphorus doped polysilicon films has been performed. The adsorptive-kinetic model of in-situ phosphorus doped polysilicon deposition has been developed. The values of heterogeneous reaction constants and constants, which describe the desorption p...