Оптимизация конструкции мембранных датчиков

• Date: 2009
• Main Authors: Rubcevich, I. I., Wysotsky, V. B., Kovalchuk, N. S.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2009
• Subjects: газовый анализатор; многослойная мембрана; нитрид кремния; пористый алюминий; эффективная площадь контактирования; оптимизированная конструкция
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.5.16
• Journal Title: Technology and design in electronic equipment

The possibility of reducing the power consumed by the gas concentration sensor through the introduction of cracks in the structure of the multi-layered membrane has been considered. The conduction of etching of the peaks of pores in concentrated orthophosphoric acid for increasing of the effected ar...