Исследование погрешности сопротивления тонкопленочного резистора

A relationship between a thin-film resistor resistance error and mask misalignment with a substrate conductive layer at the second photolithography stage for a thin-film resistor design in which the resistive element does not overlap conductor pads is studied. The error value is at a maximum when th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Datum:2009
1. Verfasser: Spirin, V. G.
Format: Artikel
Sprache:Ukrainian
Veröffentlicht: PE "Politekhperiodika", Book and Journal Publishers 2009
Schlagworte:
Online Zugang:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.5.42
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Назва журналу:Technology and design in electronic equipment

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Technology and design in electronic equipment