Исследование погрешности сопротивления тонкопленочного резистора
A relationship between a thin-film resistor resistance error and mask misalignment with a substrate conductive layer at the second photolithography stage for a thin-film resistor design in which the resistive element does not overlap conductor pads is studied. The error value is at a maximum when th...
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| Datum: | 2009 |
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| Format: | Artikel |
| Sprache: | Ukrainisch |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2009
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| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.5.42 |
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| Назва журналу: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| _version_ | 1856543911061749760 |
|---|---|
| author | Spirin, V. G. |
| author_facet | Spirin, V. G. |
| author_sort | Spirin, V. G. |
| baseUrl_str | |
| collection | OJS |
| datestamp_date | 2025-11-30T21:25:37Z |
| description | A relationship between a thin-film resistor resistance error and mask misalignment with a substrate conductive layer at the second photolithography stage for a thin-film resistor design in which the resistive element does not overlap conductor pads is studied. The error value is at a maximum when the resistor aspect ratio is equal to 1.0. |
| first_indexed | 2025-12-02T15:19:27Z |
| format | Article |
| id | oai:tkea.com.ua:article-641 |
| institution | Technology and design in electronic equipment |
| language | Ukrainian |
| last_indexed | 2025-12-02T15:19:27Z |
| publishDate | 2009 |
| publisher | PE "Politekhperiodika", Book and Journal Publishers |
| record_format | ojs |
| spelling | oai:tkea.com.ua:article-6412025-11-30T21:25:37Z Study of thin-film resistor resistance error Исследование погрешности сопротивления тонкопленочного резистора Spirin, V. G. thin-film resistor contact area of overlap тонкопленочный резистор контактная площадка перекрытия A relationship between a thin-film resistor resistance error and mask misalignment with a substrate conductive layer at the second photolithography stage for a thin-film resistor design in which the resistive element does not overlap conductor pads is studied. The error value is at a maximum when the resistor aspect ratio is equal to 1.0. Исследование погрешности сопротивления тонкопленочного резистора PE "Politekhperiodika", Book and Journal Publishers 2009-10-30 Article Article Peer-reviewed Article application/pdf https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.5.42 Technology and design in electronic equipment; No. 5 (2009): Tekhnologiya i konstruirovanie v elektronnoi apparature; 42-44 Технологія та конструювання в електронній апаратурі; № 5 (2009): Технология и конструирование в электронной аппаратуре; 42-44 3083-6549 3083-6530 uk https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.5.42/582 Copyright (c) 2009 Spirin V. G. http://creativecommons.org/licenses/by/4.0/ |
| spellingShingle | тонкопленочный резистор контактная площадка перекрытия Spirin, V. G. Исследование погрешности сопротивления тонкопленочного резистора |
| title | Исследование погрешности сопротивления тонкопленочного резистора |
| title_alt | Study of thin-film resistor resistance error |
| title_full | Исследование погрешности сопротивления тонкопленочного резистора |
| title_fullStr | Исследование погрешности сопротивления тонкопленочного резистора |
| title_full_unstemmed | Исследование погрешности сопротивления тонкопленочного резистора |
| title_short | Исследование погрешности сопротивления тонкопленочного резистора |
| title_sort | исследование погрешности сопротивления тонкопленочного резистора |
| topic | тонкопленочный резистор контактная площадка перекрытия |
| topic_facet | thin-film resistor contact area of overlap тонкопленочный резистор контактная площадка перекрытия |
| url | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.5.42 |
| work_keys_str_mv | AT spirinvg studyofthinfilmresistorresistanceerror AT spirinvg issledovaniepogrešnostisoprotivleniâtonkoplenočnogorezistora |