Исследование погрешности сопротивления тонкопленочного резистора

• Date: 2009
• Main Author: Spirin, V. G.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2009
• Subjects: тонкопленочный резистор; контактная площадка перекрытия
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2009.5.42
• Journal Title: Technology and design in electronic equipment

A relationship between a thin-film resistor resistance error and mask misalignment with a substrate conductive layer at the second photolithography stage for a thin-film resistor design in which the resistive element does not overlap conductor pads is studied. The error value is at a maximum when th...