Предэпитаксиальная обработка подложек GaSb для жидкофазного выращивания гомоэпитаксиальных слоев

• Date: 2008
• Main Authors: Andronova, О. V., Kurak, V. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2008
• Subjects: подложка GaSb; предэпитаксиальная обработка; химическое травление; жидкофазная эпитаксия
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2008.6.41
• Journal Title: Technology and design in electronic equipment

The results of investigation to find out the optimal conditions of pre-epitaxial GaSb substrate treatment by chemical etching in inorganic acid mixes are offered. It is shown that application of two-stage chemical treatment in HNO3:HF:H2O=3:1:2 and H2O2:HF:H2O=4:1:15 etchants give a possibility to s...