Влияние исходных дефектов на распределение механических напряжений и деформаций при окислении кремния

• Date: 2008
• Main Authors: Kulinich, O. A., Smyntyna, V. A., Glauberman, M. A., Chemeresyuk, G. G., Yatsunskiy, I. R.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2008
• Subjects: кремний; оксид; дефекты
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2008.5.62
• Journal Title: Technology and design in electronic equipment

Using modern methods, the complex structure of near-surface silicon layers in the “silicon — silicon dioxide” systems has been investigated. The dependencies of the parameters of these layers on oxidation conditions and the characteristics of the initial silicon have been identified. The influence o...