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Технология изготовления автоэмиссионных кремниевых катодов субмикронных размеров

Modern fabrication technologies of field emission cathodes are analyzed. A practical method for forming topological elements of submicron dimensions is proposed. A CMOS-based technology using micron-scale photomasks has been developed and modeled for the fabrication of single-tip, multi-tip, and bl...

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Bibliographic Details
Date:2007
Main Authors: Druzhynin, A. A., Holota, V. I., Kogut, I. T.
Format: Article
Language:Ukrainian
Published: PE "Politekhperiodika", Book and Journal Publishers 2007
Subjects:
технология изготовления
субмикронный размер
автоэмиссионный катод
апертура электрода
электрическое поле
Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.5.50
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Journal Title:Technology and design in electronic equipment

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Technology and design in electronic equipment

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https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.5.50

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