Трехкоординатный пьезокерамический сканер на биморфных пьезоэлементах для зондового наномикроскопа
A design of a piezoceramic scanner for nanomicroscopes based on bimorph piezoelements is proposed and investigated. A model of the scanner was constructed and analyzed using the MicroCap 7.0 software. It was established that the coupling level between the bimorph piezoelements generating oscillation...
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| Datum: | 2007 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | Ukrainisch |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2007
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.4.13 |
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| Назва журналу: | Technology and design in electronic equipment |