Трехкоординатный пьезокерамический сканер на биморфных пьезоэлементах для зондового наномикроскопа

• Date: 2007
• Main Authors: Sharapov, V. M., Gurjiy, A. N., Filimonov, S. A.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2007
• Subjects: наномикроскоп; пьезокерамический сканер; построение модели
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.4.13
• Journal Title: Technology and design in electronic equipment

A design of a piezoceramic scanner for nanomicroscopes based on bimorph piezoelements is proposed and investigated. A model of the scanner was constructed and analyzed using the MicroCap 7.0 software. It was established that the coupling level between the bimorph piezoelements generating oscillation...