Наноструктурированные пленки ZnO для устройств микроэлектроники и оптики

• Date: 2006
• Keywords: keywords
• Main Authors: Belyanin, A. F., Krivchenko, V. A., Lopaev, D. V., Pavlushkin, L. V., Paschenko, P. V., Pirogov, V. G., Polyakov, S. N., Suetin, N. V., Sushentsov, N. I.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2006
• Subjects: пленки ZnO; магнетронное распыление; электроника; оптика
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.6.48
• Journal Title: Technology and design in electronic equipment

ZnO films were obtained by RF magnetron sputtering. An additional magnetic field was applied using a magnetic system placed behind the substrate holder. The influence of process parameters on the structure and functional properties of the films was established. ZnO films were employed in the develop...