Обобщенный теоретический подход к анализу газофазных процессов эпитаксии
A generalized methodology for modeling kinetic processes of gas-phase formation and the transport of components under nonequilibrium concentration fields in inhomogeneous temperature conditions is proposed. Probabilistic methods were used to calculate mass transfer characteristics. A system of diffu...
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| Date: | 2006 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2006
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.3.50 |
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| Journal Title: | Technology and design in electronic equipment |