Вирощування гетероепітаксійних шарів на неізоперіодних підкладках мeтодом скануючої рідиннофазової епітаксії
Heterostructures with lattice mismatched and compositionally different layers are widely used in modern electronic and optoelectronic device engineering. Generally such structures are manufactured by the methods of metal-organic vapor phase epitaxy, metal-organic chemical vapor deposition and molecu...
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| Date: | 2020 |
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| Main Authors: | , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2020
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2020.5-6.33 |
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| Journal Title: | Technology and design in electronic equipment |