Газочувствительные структуры "силицид кобальта – пористый кремний – кремний"
The phenomena of local nucleation and subsequent lateral crystallization of the CoSi2 silicide phase on the surface of porous silicon have been studied. A technology for forming a metallic electrode grid based on cobalt silicide for gas-sensitive surface-barrier silicon structures is proposed. Mult...
Gespeichert in:
| Datum: | 2006 |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | Ukrainisch |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2006
|
| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.1.34 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Technology and design in electronic equipment |