Газочувствительные структуры "силицид кобальта – пористый кремний – кремний"

• Date: 2006
• Main Authors: Belousov, I. V., Buzaneva, E. V., Kuznetsov, G. V.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2006
• Subjects: силицидная фаза; пористый кремний; многослойная структура; газовый датчик
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.1.34
• Journal Title: Technology and design in electronic equipment

The phenomena of local nucleation and subsequent lateral crystallization of the CoSi2 silicide phase on the surface of porous silicon have been studied. A technology for forming a metallic electrode grid based on cobalt silicide for gas-sensitive surface-barrier silicon structures is proposed. Mult...