Система фотометрического контроля скорости травления тонких диэлектрических пленок

• Date: 2006
• Main Authors: Semyonova, S. E., Semyonov, E. I.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2006
• Subjects: автоматизация; фотометрический контроль; скорость травления; диэлектрические пленки; тонкие пленки
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2006.1.43
• Journal Title: Technology and design in electronic equipment

A methodology for photometric control of the etching rate of thin dielectric films is proposed, the essence of which consists in applying methods of double differentiation and time intervals to the signal of a photometric measuring device. An automated photometric system implementing this methodolo...