Electrical properties of semiconductor structures with Si nanoclusters in SiO2 grown by high temperature annealing technology of SiOX layer, X<2
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| Date: | 2010 |
|---|---|
| Main Authors: | S. V. Bunak, A. A. Buyanin, V. V. Ilchenko, V. V. Marin, V. P. Melnik, I. M. Khacevich, O. V. Tretyak, A. G. Shkavro |
| Format: | Article |
| Language: | English |
| Published: |
2010
|
| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349118 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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