Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing
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| Date: | 2010 |
|---|---|
| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
2010
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| Series: | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000349129 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859602902699474944 |
|---|---|
| author | V. A. Smyntyna O. V. Sviridova |
| author_facet | V. A. Smyntyna O. V. Sviridova |
| author_sort | V. A. Smyntyna |
| collection | Open-Science |
| first_indexed | 2025-07-22T15:14:51Z |
| format | Article |
| id | open-sciencenbuvgovua-100051 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T15:14:51Z |
| publishDate | 2010 |
| record_format | dspace |
| series | Semiconductor Physics, Quantum Electronics and Optoelectronics |
| spelling | open-sciencenbuvgovua-1000512024-04-17T17:54:44Z Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing V. A. Smyntyna O. V. Sviridova 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349129 Article |
| spellingShingle | Semiconductor Physics, Quantum Electronics and Optoelectronics V. A. Smyntyna O. V. Sviridova Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title | Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title_full | Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title_fullStr | Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title_full_unstemmed | Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title_short | Genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| title_sort | genesis of initial defects in the process of monocrystalline silicon oxidation with subsequent scribing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000349129 |
| work_keys_str_mv | AT vasmyntyna genesisofinitialdefectsintheprocessofmonocrystallinesiliconoxidationwithsubsequentscribing AT ovsviridova genesisofinitialdefectsintheprocessofmonocrystallinesiliconoxidationwithsubsequentscribing |