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Influence of the plasma chemical etching on the silicon plates surface of photo electric converters

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Bibliographic Details
Date:	2006
Main Authors:	B. P. Polozov, O. A. Fedorovich, V. N. Golotjuk, A. A. Marinenko, D. V. Lukomskij
Format:	Article
Language:	English
Published:	2006
Series:	Technology and design in electronic equipment
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000455229
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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