Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation

Збережено в:
Бібліографічні деталі
Дата:2004
Автори: D. L. Voronov, Ju. Devizenko, E. N. Zubarev, V. V. Kondratenko, A. V. Penkov, V. A. Sevrjukova, V. V. Bobkov, T. I. Peregon, L. P. Tishchenko
Формат: Стаття
Мова:English
Опубліковано: 2004
Назва видання:Physical surface engineering
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000849735
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-1067932024-04-17T19:09:37Z Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation D. L. Voronov Ju. Devizenko E. N. Zubarev V. V. Kondratenko A. V. Penkov V. A. Sevrjukova V. V. Bobkov T. I. Peregon L. P. Tishchenko 1999-8074 2004 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849735 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
D. L. Voronov
Ju. Devizenko
E. N. Zubarev
V. V. Kondratenko
A. V. Penkov
V. A. Sevrjukova
V. V. Bobkov
T. I. Peregon
L. P. Tishchenko
Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation
format Article
author D. L. Voronov
Ju. Devizenko
E. N. Zubarev
V. V. Kondratenko
A. V. Penkov
V. A. Sevrjukova
V. V. Bobkov
T. I. Peregon
L. P. Tishchenko
author_facet D. L. Voronov
Ju. Devizenko
E. N. Zubarev
V. V. Kondratenko
A. V. Penkov
V. A. Sevrjukova
V. V. Bobkov
T. I. Peregon
L. P. Tishchenko
author_sort D. L. Voronov
title Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation
title_short Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation
title_full Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation
title_fullStr Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation
title_full_unstemmed Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation
title_sort initial stages of intermixing in mo/si multilayer coatings during he ion irradiation
publishDate 2004
url http://jnas.nbuv.gov.ua/article/UJRN-0000849735
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AT vvbobkov initialstagesofintermixinginmosimultilayercoatingsduringheionirradiation
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first_indexed 2024-04-18T06:07:59Z
last_indexed 2024-04-18T06:07:59Z
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