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Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation

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Bibliographic Details
Date:	2004
Main Authors:	D. L. Voronov, Ju. Devizenko, E. N. Zubarev, V. V. Kondratenko, A. V. Penkov, V. A. Sevrjukova, V. V. Bobkov, T. I. Peregon, L. P. Tishchenko
Format:	Article
Language:	English
Published:	2004
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000849735
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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