High-frequency discharges of low pressure in vacuum-plasma technology of low power-consuming for microstructure etching
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| Date: | 2004 |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2004
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000849744 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |