2025-02-23T02:59:17-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22open-sciencenbuvgovua-106806%22&qt=morelikethis&rows=5
2025-02-23T02:59:17-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22open-sciencenbuvgovua-106806%22&qt=morelikethis&rows=5
2025-02-23T02:59:17-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T02:59:17-05:00 DEBUG: Deserialized SOLR response
Plasma cleaning of technological chambers in rf capacitive discharges

Plasma cleaning of technological chambers in rf capacitive discharges

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Bibliographic Details
Main Authors: V. Lisovskij, Zh.-P. But, K. Landri, D. Due, V. Kasan
Format: Article
Language:English
Published: 2004
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000849749
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2025-02-23T02:59:17-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22open-sciencenbuvgovua-106806%22&qt=morelikethis
2025-02-23T02:59:17-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&rows=40&rows=5&wt=json&json.nl=arrarr&q=id%3A%22open-sciencenbuvgovua-106806%22&qt=morelikethis
2025-02-23T02:59:17-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-23T02:59:17-05:00 DEBUG: Deserialized SOLR response

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