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Plasma cleaning of technological chambers in rf capacitive discharges

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Bibliographic Details
Date:	2004
Main Authors:	V. Lisovskij, Zh.-P. But, K. Landri, D. Due, V. Kasan
Format:	Article
Language:	English
Published:	2004
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000849749
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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