The investigation of RF discharge in the procession-plasma method by coating films
Збережено в:
| Дата: | 2003 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2003
|
| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000849880 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-106817 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1068172024-04-17T19:09:52Z The investigation of RF discharge in the procession-plasma method by coating films V. I. Gritsenko V. M. Beresnev O. M. Shvets 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849880 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. I. Gritsenko V. M. Beresnev O. M. Shvets The investigation of RF discharge in the procession-plasma method by coating films |
| format |
Article |
| author |
V. I. Gritsenko V. M. Beresnev O. M. Shvets |
| author_facet |
V. I. Gritsenko V. M. Beresnev O. M. Shvets |
| author_sort |
V. I. Gritsenko |
| title |
The investigation of RF discharge in the procession-plasma method by coating films |
| title_short |
The investigation of RF discharge in the procession-plasma method by coating films |
| title_full |
The investigation of RF discharge in the procession-plasma method by coating films |
| title_fullStr |
The investigation of RF discharge in the procession-plasma method by coating films |
| title_full_unstemmed |
The investigation of RF discharge in the procession-plasma method by coating films |
| title_sort |
investigation of rf discharge in the procession-plasma method by coating films |
| publishDate |
2003 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000849880 |
| work_keys_str_mv |
AT vigritsenko theinvestigationofrfdischargeintheprocessionplasmamethodbycoatingfilms AT vmberesnev theinvestigationofrfdischargeintheprocessionplasmamethodbycoatingfilms AT omshvets theinvestigationofrfdischargeintheprocessionplasmamethodbycoatingfilms AT vigritsenko investigationofrfdischargeintheprocessionplasmamethodbycoatingfilms AT vmberesnev investigationofrfdischargeintheprocessionplasmamethodbycoatingfilms AT omshvets investigationofrfdischargeintheprocessionplasmamethodbycoatingfilms |
| first_indexed |
2024-04-18T06:08:04Z |
| last_indexed |
2024-04-18T06:08:04Z |
| _version_ |
1796888427478646784 |