The investigation of RF discharge in the procession-plasma method by coating films
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| Date: | 2003 |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
2003
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| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000849880 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606316811550720 |
|---|---|
| author | V. I. Gritsenko V. M. Beresnev O. M. Shvets |
| author_facet | V. I. Gritsenko V. M. Beresnev O. M. Shvets |
| author_sort | V. I. Gritsenko |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:17:27Z |
| format | Article |
| id | open-sciencenbuvgovua-106817 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:17:27Z |
| publishDate | 2003 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1068172024-04-17T19:09:52Z The investigation of RF discharge in the procession-plasma method by coating films V. I. Gritsenko V. M. Beresnev O. M. Shvets 1999-8074 2003 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000849880 Article |
| spellingShingle | Physical surface engineering V. I. Gritsenko V. M. Beresnev O. M. Shvets The investigation of RF discharge in the procession-plasma method by coating films |
| title | The investigation of RF discharge in the procession-plasma method by coating films |
| title_full | The investigation of RF discharge in the procession-plasma method by coating films |
| title_fullStr | The investigation of RF discharge in the procession-plasma method by coating films |
| title_full_unstemmed | The investigation of RF discharge in the procession-plasma method by coating films |
| title_short | The investigation of RF discharge in the procession-plasma method by coating films |
| title_sort | investigation of rf discharge in the procession-plasma method by coating films |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000849880 |
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