Formation of neutral atomic beam for dry etching and study its charachteristics
Saved in:
| Date: | 2006 |
|---|---|
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
2006
|
| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000855337 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606320970203136 |
|---|---|
| author | A. V. Voznyj Dzh. Ju. Jam Ju. Kropotov V. I. Farenik |
| author_facet | A. V. Voznyj Dzh. Ju. Jam Ju. Kropotov V. I. Farenik |
| author_sort | A. V. Voznyj |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:17:36Z |
| format | Article |
| id | open-sciencenbuvgovua-106837 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:17:36Z |
| publishDate | 2006 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1068372024-04-17T19:10:02Z Formation of neutral atomic beam for dry etching and study its charachteristics A. V. Voznyj Dzh. Ju. Jam Ju. Kropotov V. I. Farenik 1999-8074 2006 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000855337 Article |
| spellingShingle | Physical surface engineering A. V. Voznyj Dzh. Ju. Jam Ju. Kropotov V. I. Farenik Formation of neutral atomic beam for dry etching and study its charachteristics |
| title | Formation of neutral atomic beam for dry etching and study its charachteristics |
| title_full | Formation of neutral atomic beam for dry etching and study its charachteristics |
| title_fullStr | Formation of neutral atomic beam for dry etching and study its charachteristics |
| title_full_unstemmed | Formation of neutral atomic beam for dry etching and study its charachteristics |
| title_short | Formation of neutral atomic beam for dry etching and study its charachteristics |
| title_sort | formation of neutral atomic beam for dry etching and study its charachteristics |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000855337 |
| work_keys_str_mv | AT avvoznyj formationofneutralatomicbeamfordryetchingandstudyitscharachteristics AT dzhjujam formationofneutralatomicbeamfordryetchingandstudyitscharachteristics AT jukropotov formationofneutralatomicbeamfordryetchingandstudyitscharachteristics AT vifarenik formationofneutralatomicbeamfordryetchingandstudyitscharachteristics |