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Formation of neutral atomic beam for dry etching and study its charachteristics

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Bibliographic Details
Date:	2006
Main Authors:	A. V. Voznyj, Dzh. Ju. Jam, Ju. Kropotov, V. I. Farenik
Format:	Article
Language:	English
Published:	2006
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000855337
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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