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Micro-nanolayer coverings produced by the method vacuum-arc deposition from use the HF-discharge

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Bibliographic Details
Date:	2006
Main Authors:	V. M. Beresnev, V. T. Tolok, O. M. Shvets, E. V. Fursova, N. N. Chernyshov, L. V. Malikov
Format:	Article
Language:	English
Published:	2006
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000855338
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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