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Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films

Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films

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Bibliographic Details
Main Authors: V. V. Petukhov, A. A. Goncharov, V. A. Konovalov, D. N. Terpij, V. A. Stupak
Format: Article
Language:English
Published: 2005
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000859385
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spelling open-sciencenbuvgovua-1070002024-04-17T19:11:09Z Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak 1999-8074 2005 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000859385 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. V. Petukhov
A. A. Goncharov
V. A. Konovalov
D. N. Terpij
V. A. Stupak
Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films
format Article
author V. V. Petukhov
A. A. Goncharov
V. A. Konovalov
D. N. Terpij
V. A. Stupak
author_facet V. V. Petukhov
A. A. Goncharov
V. A. Konovalov
D. N. Terpij
V. A. Stupak
author_sort V. V. Petukhov
title Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films
title_short Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films
title_full Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films
title_fullStr Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films
title_full_unstemmed Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films
title_sort influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films
publishDate 2005
url http://jnas.nbuv.gov.ua/article/UJRN-0000859385
work_keys_str_mv AT vvpetukhov influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms
AT aagoncharov influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms
AT vakonovalov influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms
AT dnterpij influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms
AT vastupak influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms
first_indexed 2024-04-18T06:08:49Z
last_indexed 2024-04-18T06:08:49Z
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