Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films
Збережено в:
| Дата: | 2005 |
|---|---|
| Автори: | , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2005
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000859385 |
| Теги: |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-107000 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-1070002024-04-17T19:11:09Z Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak 1999-8074 2005 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000859385 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| format |
Article |
| author |
V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak |
| author_facet |
V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak |
| author_sort |
V. V. Petukhov |
| title |
Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_short |
Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_full |
Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_fullStr |
Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_full_unstemmed |
Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_sort |
influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| publishDate |
2005 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000859385 |
| work_keys_str_mv |
AT vvpetukhov influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms AT aagoncharov influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms AT vakonovalov influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms AT dnterpij influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms AT vastupak influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms |
| first_indexed |
2024-04-18T06:08:49Z |
| last_indexed |
2024-04-18T06:08:49Z |
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