Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films
Saved in:
| Date: | 2005 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2005
|
| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000859385 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606357936701440 |
|---|---|
| author | V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak |
| author_facet | V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak |
| author_sort | V. V. Petukhov |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:19:32Z |
| format | Article |
| id | open-sciencenbuvgovua-107000 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:19:32Z |
| publishDate | 2005 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1070002024-04-17T19:11:09Z Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak 1999-8074 2005 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000859385 Article |
| spellingShingle | Physical surface engineering V. V. Petukhov A. A. Goncharov V. A. Konovalov D. N. Terpij V. A. Stupak Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title | Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_full | Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_fullStr | Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_full_unstemmed | Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_short | Influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| title_sort | influence of spattering regimes and spattering system geometry on the thickness and composition of prepared films |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000859385 |
| work_keys_str_mv | AT vvpetukhov influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms AT aagoncharov influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms AT vakonovalov influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms AT dnterpij influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms AT vastupak influenceofspatteringregimesandspatteringsystemgeometryonthethicknessandcompositionofpreparedfilms |