Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma

Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma

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Bibliographic Details
Date:2008
Main Authors: V. M. Shulaev, A. A. Andreev, V. A. Stolbovoj, G. A. Pribytkov, A. V. Gurskikh, E. N. Korosteleva, V. V. Korzhova
Format: Article
Language:English
Published: 2008
Series:Physical surface engineering
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000867771
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-107331
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spelling open-sciencenbuvgovua-1073312024-04-17T19:13:02Z Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000867771 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. M. Shulaev
A. A. Andreev
V. A. Stolbovoj
G. A. Pribytkov
A. V. Gurskikh
E. N. Korosteleva
V. V. Korzhova
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
format Article
author V. M. Shulaev
A. A. Andreev
V. A. Stolbovoj
G. A. Pribytkov
A. V. Gurskikh
E. N. Korosteleva
V. V. Korzhova
author_facet V. M. Shulaev
A. A. Andreev
V. A. Stolbovoj
G. A. Pribytkov
A. V. Gurskikh
E. N. Korosteleva
V. V. Korzhova
author_sort V. M. Shulaev
title Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
title_short Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
title_full Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
title_fullStr Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
title_full_unstemmed Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
title_sort vacuum-arc deposition of nanostructure ti-si-n coatings from multi-component plasma
publishDate 2008
url http://jnas.nbuv.gov.ua/article/UJRN-0000867771
work_keys_str_mv AT vmshulaev vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT aaandreev vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT vastolbovoj vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT gapribytkov vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT avgurskikh vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT enkorosteleva vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT vvkorzhova vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
first_indexed 2025-07-22T17:25:49Z
last_indexed 2025-07-22T17:25:49Z
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