Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
Збережено в:
Дата: | 2008 |
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Автори: | , , , , , , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2008
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Назва видання: | Physical surface engineering |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000867771 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1073312024-04-17T19:13:02Z Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000867771 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Physical surface engineering |
spellingShingle |
Physical surface engineering V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
format |
Article |
author |
V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova |
author_facet |
V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova |
author_sort |
V. M. Shulaev |
title |
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
title_short |
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
title_full |
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
title_fullStr |
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
title_full_unstemmed |
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
title_sort |
vacuum-arc deposition of nanostructure ti-si-n coatings from multi-component plasma |
publishDate |
2008 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0000867771 |
work_keys_str_mv |
AT vmshulaev vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT aaandreev vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT vastolbovoj vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT gapribytkov vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT avgurskikh vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT enkorosteleva vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT vvkorzhova vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma |
first_indexed |
2024-04-18T06:10:08Z |
last_indexed |
2024-04-18T06:10:08Z |
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