Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma

Збережено в:
Бібліографічні деталі
Дата:2008
Автори: V. M. Shulaev, A. A. Andreev, V. A. Stolbovoj, G. A. Pribytkov, A. V. Gurskikh, E. N. Korosteleva, V. V. Korzhova
Формат: Стаття
Мова:English
Опубліковано: 2008
Назва видання:Physical surface engineering
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0000867771
Теги: Додати тег
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-107331
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spelling open-sciencenbuvgovua-1073312024-04-17T19:13:02Z Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000867771 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
V. M. Shulaev
A. A. Andreev
V. A. Stolbovoj
G. A. Pribytkov
A. V. Gurskikh
E. N. Korosteleva
V. V. Korzhova
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
format Article
author V. M. Shulaev
A. A. Andreev
V. A. Stolbovoj
G. A. Pribytkov
A. V. Gurskikh
E. N. Korosteleva
V. V. Korzhova
author_facet V. M. Shulaev
A. A. Andreev
V. A. Stolbovoj
G. A. Pribytkov
A. V. Gurskikh
E. N. Korosteleva
V. V. Korzhova
author_sort V. M. Shulaev
title Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
title_short Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
title_full Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
title_fullStr Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
title_full_unstemmed Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
title_sort vacuum-arc deposition of nanostructure ti-si-n coatings from multi-component plasma
publishDate 2008
url http://jnas.nbuv.gov.ua/article/UJRN-0000867771
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AT aaandreev vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT vastolbovoj vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT gapribytkov vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT avgurskikh vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT enkorosteleva vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
AT vvkorzhova vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma
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last_indexed 2024-04-18T06:10:08Z
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