Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
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| Datum: | 2008 |
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| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | English |
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2008
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| Schriftenreihe: | Physical surface engineering |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000867771 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-1073312024-04-17T19:13:02Z Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000867771 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| format |
Article |
| author |
V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova |
| author_facet |
V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova |
| author_sort |
V. M. Shulaev |
| title |
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title_short |
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title_full |
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title_fullStr |
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title_full_unstemmed |
Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title_sort |
vacuum-arc deposition of nanostructure ti-si-n coatings from multi-component plasma |
| publishDate |
2008 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000867771 |
| work_keys_str_mv |
AT vmshulaev vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT aaandreev vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT vastolbovoj vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT gapribytkov vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT avgurskikh vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT enkorosteleva vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT vvkorzhova vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma |
| first_indexed |
2025-07-22T17:25:49Z |
| last_indexed |
2025-07-22T17:25:49Z |
| _version_ |
1850422781448028160 |