Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma
Saved in:
| Date: | 2008 |
|---|---|
| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2008
|
| Series: | Physical surface engineering |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000867771 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859606449752113152 |
|---|---|
| author | V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova |
| author_facet | V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova |
| author_sort | V. M. Shulaev |
| collection | Open-Science |
| first_indexed | 2025-07-22T17:25:49Z |
| format | Article |
| id | open-sciencenbuvgovua-107331 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T17:25:49Z |
| publishDate | 2008 |
| record_format | dspace |
| series | Physical surface engineering |
| spelling | open-sciencenbuvgovua-1073312024-04-17T19:13:02Z Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova 1999-8074 2008 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000867771 Article |
| spellingShingle | Physical surface engineering V. M. Shulaev A. A. Andreev V. A. Stolbovoj G. A. Pribytkov A. V. Gurskikh E. N. Korosteleva V. V. Korzhova Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title | Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title_full | Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title_fullStr | Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title_full_unstemmed | Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title_short | Vacuum-arc deposition of nanostructure Ti-Si-N coatings from multi-component plasma |
| title_sort | vacuum-arc deposition of nanostructure ti-si-n coatings from multi-component plasma |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000867771 |
| work_keys_str_mv | AT vmshulaev vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT aaandreev vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT vastolbovoj vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT gapribytkov vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT avgurskikh vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT enkorosteleva vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma AT vvkorzhova vacuumarcdepositionofnanostructuretisincoatingsfrommulticomponentplasma |