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Research and development of technological systems based on high-frequency induction discharge for reactive ion-plasma etching of micro- and nanostructures

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Bibliographic Details
Date:	2009
Main Author:	S. V. Dudin
Format:	Article
Language:	English
Published:	2009
Series:	Physical surface engineering
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000872969
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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