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A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films

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Bibliographic Details
Date:	2021
Main Authors:	A. Semenov, D. Lubov
Format:	Article
Language:	English
Published:	2021
Series:	Technology and design in electronic equipment
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001434748
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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