Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes

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Datum:2023
1. Verfasser: M. S. Kukurudziak
Format: Artikel
Sprache:Englisch
Veröffentlicht: 2023
Schriftenreihe:Chemistry, physics and technology of surface
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0001393501
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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author M. S. Kukurudziak
author_facet M. S. Kukurudziak
author_sort M. S. Kukurudziak
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language English
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spelling open-sciencenbuvgovua-1109562024-09-16T15:24:33Z Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes M. S. Kukurudziak 2079-1704 2023 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0001393501 Article
spellingShingle Chemistry, physics and technology of surface
M. S. Kukurudziak
Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes
title Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes
title_full Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes
title_fullStr Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes
title_full_unstemmed Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes
title_short Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes
title_sort problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes
url http://jnas.nbuv.gov.ua/article/UJRN-0001393501
work_keys_str_mv AT mskukurudziak problemsofchemicaldynamicpolishinginthetechnologyofsiliconpinphotodiodes