Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes
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| Date: | 2023 |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2023
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| Series: | Chemistry, physics and technology of surface |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001393501 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859608546204712960 |
|---|---|
| author | M. S. Kukurudziak |
| author_facet | M. S. Kukurudziak |
| author_sort | M. S. Kukurudziak |
| collection | Open-Science |
| first_indexed | 2025-07-22T18:28:24Z |
| format | Article |
| id | open-sciencenbuvgovua-110956 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T18:28:24Z |
| publishDate | 2023 |
| record_format | dspace |
| series | Chemistry, physics and technology of surface |
| spelling | open-sciencenbuvgovua-1109562024-09-16T15:24:33Z Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes M. S. Kukurudziak 2079-1704 2023 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0001393501 Article |
| spellingShingle | Chemistry, physics and technology of surface M. S. Kukurudziak Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title | Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title_full | Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title_fullStr | Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title_full_unstemmed | Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title_short | Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title_sort | problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001393501 |
| work_keys_str_mv | AT mskukurudziak problemsofchemicaldynamicpolishinginthetechnologyofsiliconpinphotodiodes |