Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes
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| Date: | 2023 |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
2023
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| Series: | Chemistry, physics and technology of surface |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001393501 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-110956 |
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open-sciencenbuvgovua-1109562024-09-16T15:24:33Z Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes M. S. Kukurudziak 2079-1704 2023 en Chemistry, physics and technology of surface http://jnas.nbuv.gov.ua/article/UJRN-0001393501 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Chemistry, physics and technology of surface |
| spellingShingle |
Chemistry, physics and technology of surface M. S. Kukurudziak Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| format |
Article |
| author |
M. S. Kukurudziak |
| author_facet |
M. S. Kukurudziak |
| author_sort |
M. S. Kukurudziak |
| title |
Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title_short |
Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title_full |
Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title_fullStr |
Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title_full_unstemmed |
Problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| title_sort |
problems of chemical-dynamic polishing in the technology of silicon p-i-n photodiodes |
| publishDate |
2023 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0001393501 |
| work_keys_str_mv |
AT mskukurudziak problemsofchemicaldynamicpolishinginthetechnologyofsiliconpinphotodiodes |
| first_indexed |
2025-07-22T18:28:24Z |
| last_indexed |
2025-07-22T18:28:24Z |
| _version_ |
1850423191111991296 |