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Development of technology for obtaining nano-sized heterostructured films by ion-plasma deposition

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Bibliographic Details
Date:	2023
Main Authors:	M. T. Normuradov, Sh. T. Khozhiev, K. T. Dovranov, X. T. Davranov, M. A. Davlatov, F. K. Khollokov
Format:	Article
Language:	English
Published:	2023
Series:	Ukrainian journal of physics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001414168
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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