Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists

Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists

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Bibliographic Details
Date:2020
Main Authors: B. V. Bilanych, O. Shylenko, V. M. Latyshev, A. Feher, V. S. Bilanych, V. M. Rizak, V. Komanicky
Format: Article
Language:English
Published: 2020
Series:Ukrainian Journal of Physics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001127980
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-11268
record_format dspace
spelling open-sciencenbuvgovua-112682024-02-25T17:54:50Z Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists B. V. Bilanych O. Shylenko V. M. Latyshev A. Feher V. S. Bilanych V. M. Rizak V. Komanicky 0372-400X 2020 en Ukrainian Journal of Physics http://jnas.nbuv.gov.ua/article/UJRN-0001127980 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Ukrainian Journal of Physics
spellingShingle Ukrainian Journal of Physics
B. V. Bilanych
O. Shylenko
V. M. Latyshev
A. Feher
V. S. Bilanych
V. M. Rizak
V. Komanicky
Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
format Article
author B. V. Bilanych
O. Shylenko
V. M. Latyshev
A. Feher
V. S. Bilanych
V. M. Rizak
V. Komanicky
author_facet B. V. Bilanych
O. Shylenko
V. M. Latyshev
A. Feher
V. S. Bilanych
V. M. Rizak
V. Komanicky
author_sort B. V. Bilanych
title Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
title_short Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
title_full Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
title_fullStr Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
title_full_unstemmed Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists
title_sort interaction of chalcogenide as4se96 films with electron beam when used as electronic resists
publishDate 2020
url http://jnas.nbuv.gov.ua/article/UJRN-0001127980
work_keys_str_mv AT bvbilanych interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT oshylenko interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT vmlatyshev interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT afeher interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT vsbilanych interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT vmrizak interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
AT vkomanicky interactionofchalcogenideas4se96filmswithelectronbeamwhenusedaselectronicresists
first_indexed 2025-07-17T12:07:12Z
last_indexed 2025-07-17T12:07:12Z
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