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Investigation of SiC films obtained on a porous-Si/Si substrate

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Bibliographic Details
Date:	2024
Main Authors:	V. V. Kidalov, A. F. Dyadenchuk, A. G. Zhuk, O. Y. Gudimenko, S. V. Simchenko
Format:	Article
Language:	English
Published:	2024
Series:	Chemistry, physics and technology of surface
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001504130
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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